Comfortech | SolidSpec – 37003700DUV
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SolidSpec – 37003700DUV

Shimadzu has released the SolidSpec-3700/3700DUV series, their top-of-the-line UV-VIS-NIR spectrophotometers. The SolidSpec-3700DUV incorporates the ability for deep UV measurements down to 165 nm with N2 gas purging.
The SolidSpec-3700/3700DUV series was developed to satisfy the needs of the electronics and optics markets. These systems also satisfy the latest technological advances. For example, they are capable of measuring the full-area of 12-inch wafers, evaluating the near infrared reflectance of anti-reflective coatings used on optical communications-related devices, and evaluating optical materials in the deep UV region that are needed because of shorter wavelengths being used for irradiation lasers used in exposure systems for semiconductor production.


New Technology
The SolidSpec features the newest technology in UV/VIS/NIR spectrophotometers:

World’s first UV-VIS-NIR spectrophotometer incorporating three detectors to achieve high sensitivity

The SolidSpec-3700/3700DUV Series are the world’s first UV-VIS-NIR spectrophotometers incorporating three detectors. A photomultiplier is used for the UV-VIS region, and an InGaAs detector and cooled PbS detector are used for the NIR region. The photomultiplier and PbS detectors lose sensitivity in the 850 to 1600 nm wavelength range, but the SolidSpec-3700/3700DUV series includes an InGaAs detector that is highly sensitive in that region. Therefore, these systems are able to achieve highly sensitive measurements over the entire NIR range.


Extremely high sensitivity and low stray light levels

By using a photomultiplier and D2 lamp with a fused quartz window, and an integrating sphere with inner walls of special polymer that is highly reflective up through the DUV range, the SolidSpec-3700DUV is capable of measurements throughout the 175 to 2600 nm range, even when using the integrating sphere. If the optional direct DUV detection unit is installed, the system is capable of measurements over the 165 to 3300 nm range. This 165 to 3300 nm range is the widest for a UV-VIS-NIR spectrophotometer currently available in the market.


An extra-large sample compartment allows a wide variety of samples to be tested

With an innovative three-dimensional optical system (patent pending) and a large sample compartment intended for non-destructive testing, large samples up to 700 x 560 mm can be measured. In addition, an automatic X-Y stage (optional) allows high-throughput measurements.


Ideal For Multiple Industries

The SolidSpec’s high sensitivity and large-sample compartment make it the ideal instrument for multiple industries:


Flat Panel Display (FPD)-related Industries
In FPD-related industries, large-sample compartments are important for non-destructive measurements of increasingly larger FPD materials. High sensitivity in the NIR region is also important for evaluating the characteristics of FPD materials.


Semiconductor-related Industries 
The SolidSpec will give you measurements in the DUV range, which are required for evaluating optical materials, because increasingly shorter wavelengths are used for irradiation lasers in exposure systems for semiconductor production. Large-sample compartments are also important for full-area measurement of 12-inch wafers.


Optical Communications-related Industries 
High sensitivity in the NIR region, which the SolidSpec provides, is important for evaluating anti-reflective coatings for their low transmittance in the NIR region (1300 to 1500 nm range).


Optical Materials-related Industries 
In these industries, where accurate measurements of optical characteristics are required over the DUV to NIR range, high sensitivity over the DUV to NIR range is important. The SolidSpec gives you that sensitivity. Large-sample compartments are also important for non-destructive testing of optical materials.


Wavelength Range Solidspec-3700 Standard Model: 240nm-2600nm, 190nm-3300nm(when using Direct Detection Unit DDU)
Solidspec-3700DUV Deep UV model: 175nm-2600nm, 165nm-3300nm(when using Direct Detection Unit DDU-DUV)
Spectral Bandwidth 8 steps in ultraviolet and visible region: 0.1, 0.2, 0.5, 1, 2, 3, 5, 8nm
10 steps in near-infrared region: 0.2, 0.5, 1, 2, 3, 5, 8, 12, 20, 32nm
Resolution* 0.1nm
Display of Wavelength 0.01nm display
Wavelength Accuracy* ±0.2nm in ultraviolet and visible region / ±0.8nm in near-infrared region
Wavelength Repeatability* ±0.08nm in ultraviolet and visible region / within ±0.32nm in near-infrared region
Wavelength Scanning Speed Wavelength Setting By
About 5,000nm/min in ultraviolet and visible region / About 20,000nm/min in near-infrared region
Wavelength Scanning By
Maximum 3600nm/min for PMT and InGaAs, Maximum 1600nm/min of PbS
Switching of the Light Source The light sources are switched automatically in conjunction with wavelength scanning. The wavelength at which the light source are switched in the range of 282 nm to 393 nm in 0.1nm increments
Stray Light* Less than 0.00008% (220nm/Nal)
Less than 0.00005% (340nm,NaN02)
Less than 0.0005% (1420nm, H20)
Less than 0.005% (2365nm, CHCl3)
Photometric System Double beam, direct ratio measuring system
Photometric Range -6 to 6Abs
Photometric Accuracy ±0.003Abs(1Abs), ±0.002Abs(0.5~1Abs) determined with NIST 930D standard filter
Photometric Repeatability 0.001Abs (0~0.5Abs), 0.002Abs (0.5~1Abs) determined under conditions of 1 second accumulation and maximum deviation for five times measurements
Noise Under 0.0002Abs (500nm, SBW 8nm), Under 0.00005Abs (500nm, SBW 8nm) determined under conditions of RMS value at 0Abs and 1 second response
When using the Direct Detection Unit DDU/DDU-DUV, under 0.00005Abs (500nm, SBW 2nm), under 0.00008Abs (900nm, SBW 2nm), under
0.00003Abs (1500nm, SBW 2nm) determined under conditions of RMS value a 0 Abs and 1 second response.
Baseline Flatness ±0.003Abs (240~350nm, SBW 8nm)
±0.002Abs (350~1600nm, Visible Region: SBW 8nm, Near-Infrared region: SBW 20nm)
±0.004Abs (1600~2600nm, SBW 20nm)
±0.001Abs (200~300nm) when using the Direct Detection Unit
Drift SolidSpec-3700: Within 0.0002Abs/h(after 2 hours warm-up, 500nm, 1 second accumulation)
SolidSpec-3700DUV: Within 0.0003Abs/h (after 2 hours warm-up, 500nm, 1 second accumulation)
Light Source 50W Halogen lamp (2000 hours life), Deterium lamp (socket type, 1250 hours life of for SolidSpec-3700, 300 hours of life for SolidSpec-3700DUV)
The automatic position alignment is used for maximum sensitivity
Monochromator Grating – grating type monochromator
Pre-monochromator: Concave diffraction monochromator (2 switchable diffraction gratings)
Main monochromator: High-performance blazed holographic grating in aberration-corrected Czerny-Turner mounting (2 switchable diffraction gratings)
Detector Ultravilote and visible region: R-928(SolidSpec-3700), R-955(SolidSpec-3700DUV)
Near-infrared region:InGaAs and cooled PbS cell for both
Sample Compartment Inside Dimensions: 900 (W) x 700 (D) x 350 (H) (mm)
Maximum Sample Size: 700 (W) x 560 (D) x 40 (H) (mm)
Dimensions 1000 (W) x 800 (D) x 1200 (H) (mm) (Not including protruding portions)
Weight 170kg
Ambient Temperature 15°C to 35°C
Ambient Humidity 35 to 80% (at room temperature 15°C to 30°C), 35 to 70% (at room temperature 30 to 35 degrees centrigrade) No condensation
Power Supply AC 100V/120V/220V/230V/240V, 50/60Hz 300VA (PC and Printer not included)